Turnkey
-
Canon Aligner MPA600FA Super
- Wafer size: 100mm ,125mm or 150mm , Flat wafers
- Resolution: 1.5um (6” wafer surface)
- Depth of focus: More than +/- 6 um at linewidth 1.5um
- Distortion: ≦0.5um
- Astigmatism: less than 2.0 μm
- Uniformity: less than +/- 3%
- Intensity: More than 500+/-50 mw/cm2
- Pre-alignment accuracy: less than ?100um
- Auto alignment: 3σ≦0.54um
- Throughput: 75 wafer/hours (6” wafer, exposure time:16 sec, Alignment time: 7 sec )
-
Canon Aligner MPA600FA
- Wafer size: 100mm ,125mm or 150mm , Flat wafers
- Resolution: 1.5um (6” wafer surface)
- Depth of focus: More than +/- 6 um at linewidth 1.5um
- Distortion: ≦0.5um
- Astigmatism: less than 2.0 μm
- Uniformity: less than +/- 3%
- Intensity: More than 500+/-50 mw/cm2
- Pre-alignment accuracy: less than ?100um
- Auto alignment: 3σ≦0.54um
- Throughput: 75 wafer/hours (6” wafer, exposure time:16 sec, Alignment time: 7 sec )
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