Spare Parts
Intertec Group取得CPS Lam 亞洲區獨家代理，可提供下列系列之設備原廠全新零組件:
? Novellus: Concept One (C1D, C1W)
? Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
? Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 964229 | CMP | Speedfam | FTG, BULKHEAD EXTENDED SPRAY RING 676/776 | New OEM | Contact Us |
| 966882 | CMP | Speedfam | PLATE,MTR 2 7700J | New OEM | Contact Us |
| 966886 | CMP | Speedfam | PLATE,END | New OEM | Contact Us |
| 966891 | CMP | Speedfam | HOLDER,PAD (A) 7700J | New OEM | Contact Us |
| 967177 | CMP | Speedfam | JOINT,B | New OEM | Contact Us |
| 970023 | CMP | Speedfam | O-ring G60 | New OEM | Contact Us |
| 978559 | CMP | Speedfam | FAN,MTR UNIT REPLACEMENT | New OEM | Contact Us |
| 0150-737502 | CMP | Speedfam | MOTOR,STEPPER NEMA34 POWERPAC | New OEM | Contact Us |
| 0770-109994 | CMP | Speedfam | SHAFT,ROLLER PRE-CLEAN | New OEM | Contact Us |
| 20-2331 | CMP | Speedfam | FILTER,GAS,TEFLON,1/4 IN, VCR, MALE (SAME AS 73313-03) | New OEM | Contact Us |
| 2805-771298 | CMP | Speedfam | ASSY,ROBOT TEACH PENDANT COMM CABLE | New OEM | Contact Us |
| 931297-1 | CMP | Speedfam | FTG,PLUG,1/4NPT,PFA | New OEM | Contact Us |
| AJ215238 | CMP | Speedfam | SCRW,SHLDR 10-32 X 1/4 X 3/4 SST | New OEM | Contact Us |
| 95-3370 | Gasonics | Speedfam | CYLINDER-PNEUMATIC W/D-SUB MODIFIED | New OEM | Contact Us |
| 96-3303 | Gasonics | Speedfam | CABLE ASSY, MWAVE GEN CONTROL, & MW INT | New OEM | Contact Us |
| 03-00125-04 | ARO | Speedfam | CABLE ASSY,RG218,83.3FT | New OEM | Contact Us |
| 109054 | CMP | Speedfam | O-RING,210X3MM,NBR 70,PM200 | New OEM | Contact Us |
| 110363 | CMP | Speedfam | BEARING,BALL,6X19X6MM,SST,,PM200/PM300 | New OEM | Contact Us |
| 168652 | CMP | Speedfam | VALVE,THROTTLE CHECK,M5,PM200/PM300 | New OEM | Contact Us |
| 196180 | CMP | Speedfam | O-RING,6X2MM,FKM,PM200 | New OEM | Contact Us |
| 200732 | CMP | Speedfam | SWITCH,PROXIMITY,SN 1MM B, M8X1,PM200/PM | New OEM | Contact Us |
| 207671 | CMP | Speedfam | BELT,TOOTHED,8MR-1800-20 | New OEM | Contact Us |
| 211621 | CMP | Speedfam | BELLOWS,HOSE,U,123 X 85MM,PM200 | New OEM | Contact Us |
| 212104 | CMP | Speedfam | BRUSH,ROUND, 40X56,PM200 | New OEM | Contact Us |
| 212603 | CMP | Speedfam | RING,V-TYPE,17.5-19MM,18MM,NBR,PM200 | New OEM | Contact Us |
| 212622 | CMP | Speedfam | O-RING,32X1.5MM,NBR 70,PM200/PM300 | New OEM | Contact Us |
| 219668 | CMP | Speedfam | PIN,DOWELL,2X10,SST | New OEM | Contact Us |
| 220894 | CMP | Speedfam | SWITCH,PROXIMITY,INDUCTIVE,PNP,PM200/PM3 | New OEM | Contact Us |
| 221703 | CMP | Speedfam | SEAL,RING,16X25 X3MM,STEEL,PM200 | New OEM | Contact Us |
| 222928 | CMP | Speedfam | VALVE,PILOT,PNEU,3/2 WAY,PM200/PM300 | New OEM | Contact Us |
| 225013 | CMP | Speedfam | VALVE,PRES RELIEF, NG 6/1/4 ,PM200 | New OEM | Contact Us |
| 225092 | CMP | Speedfam | VALVE,PRESSURE RELIEF,PM200/PM300 | New OEM | Contact Us |
| 227378 | CMP | Speedfam | VALVE,PRES RELIEF,NG 6/1/4,PM200/PM300 | New OEM | Contact Us |
| 232550 | CMP | Speedfam | FTG,TEE,T-FILTER, MAINTENANCE KIT,PM200/PM300 | New OEM | Contact Us |
| 232551 | CMP | Speedfam | VALVE,DIAPH,2PORT,A/O, 316 L, 240 BAR, P | New OEM | Contact Us |
| 233097 | CMP | Speedfam | MOTOR,1.5NM,PM200 | New OEM | Contact Us |
| 235502 | CMP | Speedfam | VALVE,DIAPH,3PORT,1/4NPT,PM200/PM300 | New OEM | Contact Us |
| 238264 | CMP | Speedfam | SHIM,UNDER FOIL,D500,10 M,PM200 | New OEM | Contact Us |
| 238266 | CMP | Speedfam | SHIM,UNDER FOIL,D500,50 M,PM200 | New OEM | Contact Us |
| 238267 | CMP | Speedfam | SHIM,UNDER FOIL,D500,100 M,PM200 | New OEM | Contact Us |
| 243800 | CMP | Speedfam | PIN,LOCATING,PEEK,PM200 | New OEM | Contact Us |
| 246440 | CMP | Speedfam | BELT,TIMING,TOOTHED,SYNCHRONOUS,PM300 | New OEM | Contact Us |
| 246441 | CMP | Speedfam | BELT, TIMING SYNCHRONOUS, L330 | New OEM | Contact Us |
| 246442 | CMP | Speedfam | BELT,TIMING,SYNCHRONOUS,L225MM,W6MM,PM200 | New OEM | Contact Us |
| 246449 | CMP | Speedfam | BELT,TIMING,W6MM,PM200 | New OEM | Contact Us |
| 246469 | CMP | Speedfam | CNTRLR, STEPPING MOTOR, 24-30V DC, 2A, PM200 | New OEM | Contact Us |
| 248777 | CMP | Speedfam | BELT,TIMING,SYNCHRONOUS,T5,L305MM,W16MM, | New OEM | Contact Us |
| 950020 | CMP | Speedfam | ASSY,VACUUM TANK | New OEM | Contact Us |
| 950023 | CMP | Speedfam | ASSY,PULLEY IDLER | New OEM | Contact Us |
| 950179 | CMP | Speedfam | BEARING,SPHERE,PAD,CONDITIONER | New OEM | Contact Us |
| 950610 | CMP | Speedfam | MOTOR,AC SERVO, 39 IN-LB | New OEM | Contact Us |
| 950616 | CMP | Speedfam | MOTOR, GEARHEAD, 6:1 | New OEM | Contact Us |
| 950623 | CMP | Speedfam | BASE,10 SLOT,120VAC,P/S | New OEM | Contact Us |
| 950624 | CMP | Speedfam | BASE,5 SLOT,120VAC,P/S | New OEM | Contact Us |
| 950625 | CMP | Speedfam | MOD.,INPUT,ANALOG VOLTAGE,4PT | New OEM | Contact Us |
| 950629 | CMP | Speedfam | MOD,OUTPUT,12/24VDC,POS,32PT | New OEM | Contact Us |
| 950639 | CMP | Speedfam | MTR,GEAR,24VDC,11.5 RAT | New OEM | Contact Us |
| 950677 | CMP | Speedfam | TIMING BELT, T5, KEVLAR | New OEM | Contact Us |
| 950701 | CMP | Speedfam | SENSOR, PROXIMITY | New OEM | Contact Us |
| 950776 | CMP | Speedfam | LOAD CELL,INTEGRAL AMP | New OEM | Contact Us |
| 950777 | CMP | Speedfam | TRANSDUCER, PRESSURE | New OEM | Contact Us |
| 950973 | CMP | Speedfam | MODULE,OUTPUT,ANALOG CURRENT | New OEM | Contact Us |
| 951113 | CMP | Speedfam | TERMINAL,PIN,TYPE II CRIMP | New OEM | Contact Us |
| 951198 | CMP | Speedfam | CABLE,BAM TO MICRO I/O,AUTO | New OEM | Contact Us |
| 951231 | CMP | Speedfam | CABLE,POWER,USA AMP 1 | New OEM | Contact Us |
| 951246 | CMP | Speedfam | Cable, Bam to Micro I/O | New OEM | Contact Us |
| 951287 | CMP | Speedfam | CYLINDER,AIR 5/16BX1/2 ST | New OEM | Contact Us |
| 951289 | CMP | Speedfam | SWITCH,LIMIT SPST 7A | New OEM | Contact Us |
| 951291 | CMP | Speedfam | ACTUATOR,ROLLER MICRO SWITCH | New OEM | Contact Us |
| 951353 | CMP | Speedfam | FUSE,600VAC,45A | New OEM | Contact Us |
| 951399 | CMP | Speedfam | FUSE,2A,250V | New OEM | Contact Us |
| 951401 | CMP | Speedfam | FUSE,5A, 250V | New OEM | Contact Us |
| 951403 | CMP | Speedfam | FUSE, 10A, 250V | New OEM | Contact Us |
| 951414 | CMP | Speedfam | ASSY,CABLE,CYL. LOAD CUP #4 | New OEM | Contact Us |
| 951425 | CMP | Speedfam | MOTOR,AC SERVO 39IN-LB | New OEM | Contact Us |
| 951433 | CMP | Speedfam | ASSY,CABLE,PROXIMITY SNSR | New OEM | Contact Us |
| 951456 | CMP | Speedfam | ASSY,SENSOR,LATCH,MH,RGHT DOWN | New OEM | Contact Us |
| 951462 | CMP | Speedfam | CONN ASSY 41 CONTACTS | New OEM | Contact Us |
| 951483 | CMP | Speedfam | CABLE, MOTOR, POWER ROTATION 1 | New OEM | Contact Us |
| 951484 | CMP | Speedfam | CABLE,MOTOR POWER,ROTATION 5 | New OEM | Contact Us |
| 951493 | CMP | Speedfam | CABLE,MTR PWR,ROTATION 4 | New OEM | Contact Us |
| 951544 | CMP | Speedfam | ASSY,CABLE LOAD CELL | New OEM | Contact Us |
| 951547 | CMP | Speedfam | ASSY,SENSOR, PAD COND,ARM TABL | New OEM | Contact Us |
| 951565 | CMP | Speedfam | HINGE, POSITION | New OEM | Contact Us |
| 951582 | CMP | Speedfam | FUSE,250V,2A,5X20 | New OEM | Contact Us |
| 951583 | CMP | Speedfam | FUSE,250V,3.15A,5X20 | New OEM | Contact Us |
| 951627 | CMP | Speedfam | ASSY,CABLE,ARM 1-VAC TRANSDUCER | New OEM | Contact Us |
| 951634 | CMP | Speedfam | ASSY,CABLE ARM3 BACKFILL CNTRL | New OEM | Contact Us |
| 951644 | CMP | Speedfam | ASSY,CABLE,ARM 4-LOAD CELL | New OEM | Contact Us |
| 951649 | CMP | Speedfam | TRANTORQUE,6.4 I.D.,ELECTR NI | New OEM | Contact Us |
| 951654 | CMP | Speedfam | ASSY,CABLE,POWER 100 VAC,MHTA | New OEM | Contact Us |
| 951681 | CMP | Speedfam | ASSY,SNSR WAFER LOSS, ARM #1 | New OEM | Contact Us |
| 951695 | CMP | Speedfam | VALVE,PNEU. 1/4 NPT | New OEM | Contact Us |
| 951734 | CMP | Speedfam | FTG, PLUG, 1/4 NPT, SST | New OEM | Contact Us |
| 951787 | CMP | Speedfam | HOUSING, FILTER, SST | New OEM | Contact Us |
| 951788 | CMP | Speedfam | FILTER,COALESCER ELEMENT | New OEM | Contact Us |
| 951814 | CMP | Speedfam | RELAY,3POLE,24VDC COIL | New OEM | Contact Us |
| 951815 | CMP | Speedfam | RELAY,DPDT 24VDC COIL | New OEM | Contact Us |
| 951844 | CMP | Speedfam | POWER SUPPLY,120VAC,MIO | New OEM | Contact Us |
| 952156 | CMP | Speedfam | CHAIN,DRIVE,.375P,160T,PUR | New OEM | Contact Us |